The discovery of two-dimensional (2D) materials has gained worldwide attention owing to their extraordinary optical, electrical, and mechanical properties. Due to their atomic layer thicknesses, the emerging 2D materials have great advantages of enhanced interaction strength, broad operating bandwidth, and ultralow power consumption for optoelectromechanical coupling. The van der Waals (vdW) epitaxy or multidimensional integration of 2D material family provides a promising platform for on-chip advanced nano-optoelectromechanical systems (NOEMS). Here, we provide a comprehensive review on the nanomechanical properties of 2D materials and the recent advances of 2D-materials-integrated nano-electromechanical systems and nano-optomechanical systems. By utilizing active nanophotonics and optoelectronics as the interface, 2D active NOEMS and their coupling effects are particularly highlighted at the 2D atomic scale. Finally, we share our viewpoints on the future perspectives and key challenges of scalable 2D-materials-integrated active NOEMS for on-chip miniaturized, lightweight, and multifunctional integration applications.

中文翻译：

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二维材料集成光机电：近期进展和未来展望

二维 (2D) 材料的发现因其非凡的光学、电学和机械性能而受到全世界的关注。由于其原子层厚度，新兴的二维材料具有增强的相互作用强度、宽的工作带宽和用于光电机械耦合的超低功耗等巨大优势。二维材料系列的范德华 (vdW) 外延或多维集成为片上高级纳米光机电系统 (NOEMS) 提供了一个有前途的平台。在这里，我们全面回顾了二维材料的纳米力学特性以及二维材料集成纳米机电系统和纳米光机械系统的最新进展。通过利用活性纳米光子学和光电子学作为界面，二维活性 NOEMS 及其耦合效应在二维原子尺度上尤为突出。最后，我们就可扩展的二维材料集成有源 NOEMS 用于片上小型化、轻量化和多功能集成应用的未来前景和主要挑战分享了我们的观点。