The morphology and distribution of nanoscale structures, such as catalytic active nanoparticles and quantum dots on surfaces, have a significant impact on their function. Thus, the capability of monitoring these properties during manufacturing and operation is crucial for the development of devices that rely on such materials. We demonstrate a technique that allows highly surface-sensitive imaging of nanostructures on planar surfaces over large areas. The capabilities of hard x-ray grazing-incidence ptychography combine aspects from imaging, reflectometry, and grazing-incidence small angle scattering in providing images that cover a large field of view along the beam direction while providing high surface sensitivity. For homogeneous samples, it yields a surface profile sensitivity better than 1 nm normal to the surface, with a poorer resolution in the sample surface plane, (i.e., along the beam and transverse to the beam). Like other surface scattering methods, this technique facilitates the characterization of nanostructures across statistically significant surface areas or volumes but with additional spatial information. In this work, we present a reconstructed test object spanning 4.5mm×20µm$4.5\,\,\rm mm\times 20\,\, {\unicode{x00B5}}\rm m$ with 20 nm high topology.

中文翻译：

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硬X射线掠入射叠层成像：具有超高表面灵敏度的大视场纳米结构成像

纳米级结构（例如表面上的催化活性纳米颗粒和量子点）的形态和分布对其功能具有重大影响。因此，在制造和操作过程中监控这些特性的能力对于依赖此类材料的设备的开发至关重要。我们展示了一种技术，可以对大面积平面上的纳米结构进行高度表面敏感的成像。硬 X 射线掠入射叠层成像技术结合了成像、反射测量和掠入射小角度散射等方面的功能，可提供沿光束方向覆盖大视场的图像，同时提供高表面灵敏度。对于均质样品，其在垂直于表面的方向上产生的表面轮廓灵敏度优于 1 nm，但在样品表面平面（即沿着光束和横向于光束）中的分辨率较差。与其他表面散射方法一样，该技术有助于在统计上显着的表面积或体积上表征纳米结构，但具有附加的空间信息。在这项工作中，我们提出了一个跨越4.5 的重建测试对象毫米× 20 _µ m$4.5\,\,\rm mm\times 20\,\, {\unicode{x00B5}}\rm m$，具有 20 nm 高拓扑。