High electro-optical conversion efficiency is one of the most distinctive features of semiconductor lasers as compared to other types of lasers. Its further increase remains a significant objective. Further enhancing the efficiency of edge-emitting lasers (EEL), which represent the highest efficiency among semiconductor lasers at present, is challenging. The efficiency of vertical cavity surface emitting lasers (VCSELs) has always been relatively low compared to EEL. This paper, combining modeling with experiments, demonstrates the potential of multi-junction cascaded VCSELs to achieve high efficiency beyond that of EELs, our simulations show, that a 20-junction VCSEL can achieve an efficiency of more than 88% at room temperature. We fabricated VCSEL devices with different numbers of junctions and compared their energy efficiency. 15-junction VCSELs achieved a maximum efficiency of 74% at room temperature under nanosecond driving current, the corresponding differential quantum efficiency exceeds 1100%, being the largest electro-optical conversion efficiency and differential quantum efficiency reported until now for VCSELs.

与其他类型激光器相比，高电光转换效率是半导体激光器最显着的特点之一。其进一步增长仍然是一个重要目标。边缘发射激光器（EEL）是目前半导体激光器中效率最高的，进一步提高其效率具有挑战性。与 EEL 相比，垂直腔表面发射激光器 (VCSEL) 的效率一直相对较低。本文结合建模与实验，展示了多结级联 VCSEL 实现超越 EEL 的高效率的潜力，我们的模拟表明，20 结 VCSEL 在室温下可以实现超过 88% 的效率。我们制造了具有不同数量结点的 VCSEL 器件，并比较了它们的能源效率。15结VCSEL在纳秒级驱动电流下室温下实现最高效率74%，相应的微分量子效率超过1100%，是迄今为止报道的VCSEL最大的电光转换效率和微分量子效率。