Despite their excellent performance and versatility, the efficient integration of small lasers with other optical devices has long been hindered by their broad emission divergence. In this study, we introduce a novel approach for emission engineering in microdisk lasers, significantly enhancing their vertical emission output by directly integrating specially designed reflective metalenses, referred to as “meta-micromirrors”. A 5 μm-diameter microdisk laser is precisely positioned at an 8 μm focal distance on a 30 × 30 μm2 meta-micromirror featuring a numerical aperture (NA) of 0.95, accomplished through micro-transfer printing techniques. Our experiments demonstrated a notable increase in the emission efficiency within an NA of 0.65. Specifically, we observed a 2.68-fold increase in the average emission from ten microdisk lasers. This integration not only enhances the emission efficiency of small lasers but also holds considerable implications for micro- and nano-photonic integrations. The results of this integration open up new possibilities in various fields, including photonic integrated circuits, bio-sensing technologies, and the development of quantum light sources.

中文翻译：

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通过直接集成元微镜进行微盘激光器的发射工程

尽管小型激光器具有出色的性能和多功能性，但其广泛的发射发散长期以来一直阻碍着小型激光器与其他光学设备的有效集成。在这项研究中，我们引入了一种微盘激光器发射工程的新颖方法，通过直接集成专门设计的反射超透镜（称为“元微镜”）来显着增强其垂直发射输出。直径 5 μm 的微盘激光器在 30 × 30 μm 的 8 μm 焦距处精确定位2超微镜的数值孔径 (NA) 为 0.95，通过微转移印刷技术实现。我们的实验表明，在 NA 为 0.65 的情况下，发射效率显着提高。具体来说，我们观察到十个微盘激光器的平均发射增加了 2.68 倍。这种集成不仅提高了小型激光器的发射效率，而且对微米和纳米光子集成具有相当大的影响。这种集成的结果为各个领域开辟了新的可能性，包括光子集成电路、生物传感技术和量子光源的开发。