This paper presents a detailed comparative analysis of the performance and energy consumption of heating, ventilation, and air conditioning (HVAC) systems as standalone units and integrated systems, specifically focusing on semiconductor manufacturing facilities (SMFs). Highlighting the urgent need for HVAC system optimization to minimize energy waste and reduce greenhouse gas emissions, the study uncovers distinct energy consumption patterns across residential, commercial, and industrial sectors, emphasizing the unique needs of SMFs. It reveals the need for more current energy codes and standards in addressing the specialized energy demands of semiconductor fabrication plants (fabs), thereby advocating for a customized HVAC energy-design framework to enhance energy efficiency within these facilities. The research is divided into three main segments: (1) identifying the key factors that drive HVAC systems' energy consumption, (2) examining the factors that influence system performance, and (3) analyzing how these factors impact the optimization of HVAC systems in SMFs. By developing a framework that integrates design, engineering, and energy consumption data, the paper lays the groundwork for a data-intensive design approach tailor-made to meet the energy efficiency requirements of semiconductor fabs. The study's pivotal findings highlight the deficiencies of existing energy codes and standards for SMFs and propose a bespoke HVAC energy design framework. This strategy identifies critical energy consumption and performance factors unique to SMFs, recommending a data-driven design method for enhanced energy efficiency. This forward-thinking approach aims to significantly reduce energy waste and greenhouse gas emissions, establishing a new benchmark for sustainable practices in semiconductor manufacturing.

中文翻译：

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优化半导体制造的 HVAC 系统：能源效率和可持续性的数据密集型框架

本文对独立单元和集成系统的供暖、通风和空调 (HVAC) 系统的性能和能耗进行了详细的比较分析，特别关注半导体制造设施 (SMF)。该研究强调了优化暖通空调系统以最大限度地减少能源浪费和减少温室气体排放的迫切需要，揭示了住宅、商业和工业领域不同的能源消耗模式，强调了 SMF 的独特需求。它揭示了需要更新的能源法规和标准来满足半导体制造工厂 (fabs) 的专门能源需求，从而倡导定制 HVAC 能源设计框架以提高这些设施内的能源效率。该研究分为三个主要部分：(1) 确定驱动 HVAC 系统能耗的关键因素，(2) 研究影响系统性能的因素，(3) 分析这些因素如何影响 HVAC 系统的优化。 SMF。通过开发一个集成设计、工程和能耗数据的框架，本文为量身定制的数据密集型设计方法奠定了基础，以满足半导体工厂的能效要求。该研究的关键发现强调了现有 SMF 能源法规和标准的缺陷，并提出了定制的 HVAC 能源设计框架。该策略确定了 SMF 特有的关键能耗和性能因素，推荐采用数据驱动的设计方法来提高能源效率。这种前瞻性的方法旨在显着减少能源浪费和温室气体排放，为半导体制造的可持续实践建立新的基准。