Semiconductor gas sensor has the advantages of low cost, simple detection principle and fast detection speed, so it has been widely used in gas detection in industrial processes. Sensors are usually maintained at high operating temperatures to maintain high performance, which is not only high power consumption but also the risk of explosion when the target gas concentration is too high. In this paper, the method of pre-pulse-driven temperature modulation is proposed to solve this problem. The sensor structure with ceramic-based micro-hot plate substrate has faster temperature change speed, which lays the foundation for high response. This method keeps the sensor operating at low temperature and obtains high response when it is in contact with the target gas. In addition, it is accompanied by the reduction of power consumption and the improvement of response speed. In this paper, SnO sensor is used to verify the effectiveness of the pre-pulse-drivn temperature modulation strategy, and then InO and ZnO sensors are used to verify its universality. Finally, the effect of oxygen accumulation on the sensitization of pre-pulse-driven temperature modulation method is analyzed. It has been verified that pre-pulse-driven is an effective method to reduce temperature and improve sensitivity, which is worthy of promotion and further optimization.

中文翻译：

---

基于半导体气体传感器的预脉冲驱动温度调制：气体检测的低温策略


半导体气体传感器具有成本低、检测原理简单、检测速度快等优点，因此在工业过程中的气体检测中得到了广泛的应用。传感器通常保持在较高的工作温度下以保持高性能，这不仅功耗高，而且当目标气体浓度过高时存在爆炸风险。本文提出预脉冲驱动温度调制方法来解决这一问题。采用陶瓷基微热板基板的传感器结构具有更快的温度变化速度，为高响应奠定了基础。这种方法使传感器保持在低温下工作，并在与目标气体接触时获得高响应。此外，还伴随着功耗的降低和响应速度的提高。本文首先使用SnO传感器验证了预脉冲驱动温度调制策略的有效性，然后使用InO和ZnO传感器验证了其通用性。最后，分析了氧积累对预脉冲驱动温度调制方法敏化的影响。经验证，预脉冲驱动是降低温度、提高灵敏度的有效方法，值得推广和进一步优化。