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Suppression of spurious modes in lateral-excited bulk acoustic wave resonators using piston mode electrodes
Applied Physics Letters ( IF 4 ) Pub Date : 2024-05-14 , DOI: 10.1063/5.0212833
Jieyu Liu 1 , Wenjuan Liu 1, 2, 3 , Zhiwei Wen 1 , Xin Tong 1 , Yan Liu 1, 2 , Yao Cai 1, 2 , Chengliang Sun 1, 2, 4
Affiliation  

Lateral-excited bulk acoustic wave resonators (XBARs) have a large electromechanical coupling coefficient and low mechanical loss. However, XBARs have not yet been commercialized in 5G communications due to spurious modes, high TCF, and low-power handling. This paper presents a lateral-excited bulk acoustic wave resonator with piston mode electrodes named PLBAR. Compared to the conventional interdigital transducer structure, the PLBAR suppresses the transverse waves due to the irregular boundary caused by piston mode electrodes. Higher order modes are also to some extent suppressed by increasing in metallization rate. The fabricated PLBAR achieves a high Keff2 of 26.43% at 5.2 GHz using a 350 nm Z-cut lithium niobate on insulator substrate, effectively suppressing the transversal mode. Additionally, the power durability exceeds +14 dBm due to the increased metallization of the piston mode electrodes. The measured temperature coefficient of PLBAR is −42.55 ppm/°C. The PLBAR addresses some of the limitations of the XBARs and demonstrates significant improvements in performance without requiring additional fabrication steps, making it a promising solution for RF resonators in 5G communication systems.

中文翻译:

使用活塞模式电极抑制横向激励体声波谐振器中的杂散模式

横向激励体声波谐振器(XBAR)具有较大的机电耦合系数和较低的机械损耗。然而,由于杂散模式、高 TCF 和低功耗处理,XBAR 尚未在 5G 通信中商业化。本文提出了一种带有活塞模式电极的横向激励体声波谐振器,名为 PLBAR。与传统的叉指换能器结构相比,PLBAR由于活塞模式电极造成的不规则边界而抑制了横波。高阶模也通过金属化率的增加在一定程度上受到抑制。所制造的 PLBAR 在绝缘体基板上使用 350 nm Z 切割铌酸锂,在 5.2 GHz 下实现了 26.43% 的高 Keff2,有效抑制了横向模式。此外,由于活塞模式电极金属化程度的提高,功率耐久性超过了+14 dBm。 PLBAR 的测量温度系数为−42.55 ppm/°C。 PLBAR 解决了 XBAR 的一些限制,并且无需额外的制造步骤即可显着提高性能,使其成为 5G 通信系统中射频谐振器的有前途的解决方案。
更新日期:2024-05-14
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