Three-dimensional (3D) vector magnetic sensors play a significant role in a variety of industries, especially in the automotive industry, which enables the control of precise position, angle, and rotation of motion elements. Traditional 3D magnetic sensors integrate multiple sensors with their sensing orientations along the three coordinate axes, leading to a large size and inevitable nonorthogonal misalignment. Here, we demonstrate a wide linearity range 3D magnetic sensor utilizing a single L1₀-FePt Hall-bar device, whose sensitivity is 291 VA^–1 T^–1 in the z-axis and 27 VA^–1 T^–1 in the in-plane axis. Based on the spin–orbit torque-dominated magnetization reversal, the linear response of anomalous Hall resistance within a large linear range (±200 Oe) for the x, y, and z components of magnetic fields has been obtained, respectively. Typically, it exhibits a relatively lower magnetic noise level of 7.9 nV at 1 Hz than previous results, improving measurement resolution at the low frequency. Furthermore, we provide a straightforward approach for noncontact angular position detection based on a single Hall-bar device, which shows great potential for application in rotational motion control.

中文翻译：

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基于单个 FePt 自旋轨道扭矩装置的宽线性范围 3D 磁传感器和角位置检测器

三维 (3D) 矢量磁传感器在各种行业中发挥着重要作用，尤其是在汽车行业，它能够控制运动元件的精确位置、角度和旋转。传统的3D磁传感器集成了多个传感器，其传感方向沿三个坐标轴，导致尺寸较大且不可避免的非正交失准。在这里，我们展示了一种利用单个L 1 ₀ -FePt 霍尔棒器件的宽线性范围 3D 磁传感器，其灵敏度在z轴上为 291 VA ^–1 T ^–1 ，在轴上为27 VA ^–1 T ^–1 -平面轴。基于自旋轨道扭矩主导的磁化反转，分别获得了磁场x、y和z分量在大线性范围（±200 Oe）内的反常霍尔电阻的线性响应。通常，与之前的结果相比，它在 1 Hz 时表现出相对较低的磁噪声水平 7.9 nV，从而提高了低频下的测量分辨率。此外，我们提供了一种基于单个霍尔棒器件的非接触式角位置检测的简单方法，这在旋转运动控制中显示出巨大的应用潜力。